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From: http://www.voltaix.com/msds/msds-boron_trifluoride_bf3.htm#sec2

Material Safety Data Sheet for Boron Trifluoride (BF3)

Reference: Voltaix, Inc. MSDS Document Number - B020 (revision dated 7 May 01)

IN AN EMERGENCY, CALL CHEMTREC at 800-424-9300 (US toll free) or 703-527-3887 : Voltaix, Inc. MSDS Document Number - B020 (revision dated 7 May 01IN AN EMERGENCY, CALL CHEMTREC at 800-424-9300 (US toll free) or 703-527-3887

Contents:

1. Chemical Product and Company Identification
2. Composition / Information on Ingredients
3. Hazards Identification
4. First Aid Measures
5. Fire Fighting Measures
6. Accidental Release Measures
7. Handling and Storage
8. Exposure Control / Personal Protection
9. Physical and Chemical Properties
10. Stability and Reactivity
11. Toxicological Information
12. Ecological Information
13. Disposal Considerations
14. Transport Information
15. Regulatory Information
16. Other Information

Section 1: Chemical Product and Company Identification
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This MSDS is Copyrighted © Voltaix, Inc., 1994. Permission is hereby granted to duplicate it, in its entirety, for distribution with this material.

Section 2: Composition/Information on Ingredients
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Section 3: Hazards Identification
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Boron trifluoride is a colorless gas with a pungent odor. It fumes to form a dense white cloud in moist air. Boron Trifluoride's immediate health hazard is that it is a toxic gas.

Emergency Overview

NFPA 704 Rating (determined by Voltaix, Inc.):

Potential Health Effects

Routes of Exposure: Inhalation, skin, eye and mucous membrane contact.

Lengths of Exposure: Boron trifluoride has been found in animal studies to be toxic in acute (4 hour) and subchronic (several months) tests.

Severity of Effect: Depends on concentration and duration.

Target Organs: Lungs, blood, bones and teeth.

Type of Effect: Acute, high concentration exposures produce pulmonary irritation. Subchronic, low concentration exposures also produce generalized effects of fluorine exposure, including hypocalcemia.

Signs and Symptoms of Exposure: Acute exposure: coughing, shortness of breath, headache, vertigo, chills and nausea. Subchronic: dental fluorosis, increased bone, serum and urinary fluoride levels, hypocalcemia.

Medical Conditions that may be Aggravated by Exposure: None identified.

Reported Carcinogenic and Reproductive Effects: NTP has not reported genetic or long-term toxicology and carcinogenesis effects studies.

Section 4: First Aid Measures
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Inhalation
This is the primary route of exposure.

1. Remove the affected person from the gas source or contaminated area. Note: Personal Protective Equipment (PPE), including positive pressure, self contained breathing apparatus, may be required to assure the safety of the rescuer.
2. If the affected person is not breathing spontaneously, administer rescue breathing.
3. If the affected person does not have a pulse, administer CPR.
4. If medical oxygen and appropriately trained personnel are available, administer 100% oxygen to the affected person.
5. Summon an emergency ambulance. If an ambulance is not available, contact a physician, hospital, or poison control center for instruction.
6. Keep the affected person warm, comfortable, and at rest while awaiting professional medical care. Monitor the breathing and pulse continuously. Administer rescue breathing or CPR if necessary.

Skin Contact
Flush with a copious stream of water while removing contaminated clothing. Continue flushing until the professional medical assistance arrives, but for no less than fifteen minutes. Treat thermal burns by assuring that affected area is cool by flushing with cool water, then apply dry sterile dressings. If the patient is burned on the face, neck, head, or chest, assume that the airway may also have been burned and obtain professional medical assistance immediately.

Eye Contact
Flush continuously with clean water until the professional medical assistance arrives, but for no less than thirty minutes. Continuation of flushing until patient is transferred to an ophthalmologist or emergency physician is recommended.

Ingestion
Ingestion is not an observed route of exposure to gaseous hazardous materials.

Chronic Effects
None is known to Voltaix, Inc.

Note to Physicians:
The reaction products of boron trifluoride and moist air or water are fluoboric and boric acids. Therefore, skin and eye burns should be treated as exposures to acidic fluorine compounds, e.g., hydrofluoric acid. Consider the use of such agents as benzalkonium chloride, magnesium sulfate, and calcium gluconate.

Section 5: Fire Fighting Measures
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Flammability and Explosivity

Flash Point: Not applicable, this material is a nonflammable gas.

Flammability Limits in Air: Not applicable, this material is a nonflammable gas.

Autoignition Temperature: Not applicable, this material is a nonflammable gas.

Flammability Classification (per 29 CFR 1910.1200): Nonflammable gas.

Known or Anticipated Hazardous Products of Combustion: Not applicable, this material is a nonflammable gas.

Properties that may Initiate or Intensify Fire: Heating cylinder to the point of activating the pressure relief device.

Reactions that Release Flammable Gases: None.

Extinguishing Media
None

Fire Fighting Instructions
Cool the cylinder and surroundings with water from a suitable distance. Excessive pressure may develop in gas cylinders exposed to fire, which may result in explosion, regardless of the cylinder's content. Cylinders with pressure relief devices (PRD's) may release their contents through such devices if the cylinder is exposed to fire. Cylinders without PRD's have no provision for controlled release and are therefore more likely to explode if exposed to fire.

Note: If boron trifluoride is released, the water used for fire suppression and cooling may be contaminated with fluorine compounds. The discharge of such compounds to the sewer system or the environment may be restricted, requiring the containment and proper disposal of the water.

Positive pressure, self contained breathing apparatus is required for all fire fighting involving hazardous materials. Full structural fire fighting (bunker) gear is the minimum acceptable attire. The need for proximity, entry, and flashover protection and special protective clothing should be determined for each incident by a competent fire fighting safety professional

Section 6: Accidental Release Measures
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Containment

This material is a gas at atmospheric conditions. The only means of containment is the enclosure of the space into which the material is released. Such containment is described in Section 7.

Clean Up

Clean up consists of passing the entire gas volume of the enclosure through appropriate exhaust gas treatment equipment (EGTE). Purge the enclosure with a non-reactive gas, such as nitrogen, through the EGTE until an acceptably low level of contamination remains. Equipment contaminated by this material must then be cleaned or decommissioned appropriately.

Evacuation

If the release is not contained in an appropriate device or system, all personnel not appropriately protected (see Section 8) must evacuate the contaminated spaces. Consider evacuation of additional areas, as a precaution against the spread of the release or subsequent explosion or fire.

Special Instructions

The water used for cleanup may be contaminated with fluorine compounds. The discharge of such compounds to the sewer system or the environment may be restricted, requiring the containment and proper disposal of the water.

Section 7: Handling and Storage
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Handling

Handle this material only in sealed, purged systems. The design of handling systems for hazardous materials is beyond the scope of this MSDS, and should be performed by a competent, experienced professional. Consider the use of doubly-contained piping; diaphragm or bellows sealed, soft seat valves; backflow prevention devices; flash arrestors; and flow monitoring or limiting devices. Gas cabinets, with appropriate exhaust treatment, are recommended, as is automatic monitoring of the secondary enclosures and work areas for release.

Handle sealed gas cylinders in accordance with CGA P-1, Safe Handling of Compressed Gases in Containers.

Some material may have accumulated behind the outlet plug. Face the outlet away from you and wear appropriate protective equipment when removing the plug to connect the cylinder to your system.

Never introduce any substance into a gas cylinder. If you believe your cylinder may have been contaminated, notify Voltaix, Inc. immediately. Provide as much information as possible on the nature and quantity of contamination.

Storage

Store cylinders in accordance with CGA P-1, Safe Handling of Compressed Gases in Containers, local building and fire codes and other relevant regulations. Materials should be segregated by the hazards they comprise for storage.

Protect the cylinders from direct sunlight, precipitation, mechanical damage, and temperatures above 55^oC (130^oF).

Ship and store cylinders with the outlet plug and valve protective cap in place.

Section 8: Exposure Control/Personal Protection
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Engineering Controls

Local exhaust is required. Secondary containment, with appropriate exhaust gas treatment, is strongly encouraged and is required in some jurisdictions.

Monitor the work area and the secondary containment continuously for release of the material. Automatic alerting of personnel and automatic shutdown of flow are appropriate in most applications and are required in some jurisdictions.

Purge all primary containment systems with a nonreactive gas, such as nitrogen, before introducing boron trifluoride.

Personal Protective Equipment (PPE)
Respiratory Protection: Positive pressure, full face, air supplied breathing apparatus should be used for work within the secondary containment equipment if a leak is suspected or the primary containment is to be opened, e.g., for a cylinder change. Air supplied breathing apparatus is required for response to demonstrated or suspected releases from the primary containment.

Eye/Face Protection: When using respiratory protection as described above, use a face mask that provides splash and impact protection for the face and eyes. For handling sealed cylinders, wear safety glasses.

Skin Protection: Wear appropriate gloves when handling sealed cylinders. Use gloves and other skin protection, as assigned by a competent safety professional, when working within the secondary enclosure with the primary enclosure compromised, e.g., cylinder changing, to protect from exposure to the material. For response to demonstrated or suspected releases from the primary containment, the need for whole-body exposure protection should be determined by a competent safety professional.

Other Protection: Wear appropriate protective footwear when moving cylinders.

Exposure Guidelines

TLV-Ceiling: 1 ppm (ACGIH).

PEL-Ceiling: 1 ppm (3 mg/m³) (OSHA).

REL-Ceiling: 1 ppm (NIOSH).

IDLH: 25 ppm (NIOSH).

Section 9: Physical and Chemical Properties
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Notes: 1) "N/A" means not applicable.

2) Unless otherwise specified, properties are reported at 0^oC (32^oF) and 1 atmosphere (1.0 bar, 14.7 psia).

Section 10: Stability and Reactivity
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Chemical Stability: Boron trifluoride is not known to decompose thermally.

Conditions to Avoid: Exposure to air.

Incompatibility with Other Materials: Water, alkali metals, alkaline earth metals (except magnesium), alkyl nitrates, polymerizable materials.

Hazardous Decomposition, Reaction and Oxidation (other than burning) Products: Reaction with water produces fluoboric acid and boric acid.

Hazardous Polymerization: Boron trifluoride does not polymerize, but does catalyze the polymerization of other materials.

Section 11: Toxicological Information
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Acute Data (by route): Exposure by inhalation: LC₅₀, 4-hour, albino rat 420 ppm. The primary effect is the production of respiratory irritation. Reaction with air or water may produce irritation of skin, eyes and mucous membranes.

Chronic and Subchronic Data: Two of forty rats exposed to 6 ppm for 6 hours/day, 5 days/week for 13 weeks exhibited renal toxicity and signs of respiratory irritation. Six month exposures of rats, rabbits and guinea pigs produced dental fluorosis and pneumonitis at similar levels. This material is listed in the Registry of Toxic Effects of Chemical Substances (RTECS), but no information on its carcinogenicity is available.

Special Studies: None known to Voltaix, Inc.

Section 12: Ecological Information
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Ecotoxicity: LC₅₀ (96 hour, rainbow trout) 102 micrograms/liter. EC₅₀ (48 hour, water flea) 46 micrograms/liter.

Environmental Fate: Hydrolyzes to fluoboric and boric acids.

Section 13: Disposal Considerations
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Classification under RCRA, 40 CFR 261: This material meets the criteria for an "acute hazardous waste".

US EPA waste number and descriptions: None.

Special Instructions and Limitations: Treat process and other exhaust streams appropriately before release to the atmosphere.

Notice: The information above is derived from Voltaix, Inc.'s interpretation of the US federal laws, regulations and policies concerning the material, as shipped by Voltaix, Inc., at the time this MSDS was prepared. Federal controls are subject to change and state and local controls may also apply. Proper waste disposal is the responsibility of the owner of the waste. The user is encouraged to consult with appropriate experts in developing a disposal plan.

Section 14: Transport Information
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Basic Description: Boron Trifluoride, Compressed, Division 2.3 (Toxic Gas), UN 1008 Toxic - Inhalation Hazard, Hazard Zone B.

Additional Information for shipment by water: IMDG Page Number 2107. For shipment by water, a Corrosive secondary label is required.

Additional Information for shipment by air: Transportation by air is not permitted.

Section 15: Regulatory Information
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TSCA Status: This material is listed in the index of chemical substances.

CERCLA Reportable Quantity (40CFR302.4): This material is not listed.

SARA Title III Status (Section 302 (40CFR355), Section 311/312, Section 313 (40CFR372)): 40CFR355 lists boron trifluoride as an Extremely Hazardous Substance with a Threshold Planning Quantity (TPQ) of 227 kg (500 lbs.) and a Reportable Quantity (RQ) of 227 kg (500 lbs.). Boron trifluoride is listed in 40CFR372.

Note: State and local requirements may be more stringent.

Section 16: Other Information
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References

Book of SEMI Standards, Facilities Standards and Safety Guidelines. Mountain View, CA: Semiconductor Equipment and Materials International, 1993.

Borak, Jonathan, M.D., Michael Callan and William Abbott, Hazardous Materials Exposure: Emergency Response and Patient Care. Englewood Cliffs, NJ: Prentice-Hall, Inc., 1991.

Documentation of TLV's and BEI's. Cincinatti, Ohio: American Conference of Government Industrial Hygienists, 1992.

Effects of Exposure to Toxic Gases: First Aid and Treatment. Lyndhurst, NJ: Matheson Gas Products, 1977.

Fire Protection Guide on Hazardous Materials. Quincy, MA: National Fire Protection Association, 1991.

Safe Handling of Compressed Gases in Containers (Pamphlet P-1). Arlington, VA: Compressed Gas Association, Inc., 1991.

Revision Indication

Section 15: BF3 is listed in 40CFR372.

Disclaimer

Voltaix, Inc. cannot guarantee that these are the only hazards that exist. Users are solely responsible for the safe storage, handling, use and disposal of this material, and for compliance with the applicable laws, regulations and accepted practices.

Voltaix, Inc. makes no representations or warranties, either expressed or implied, of merchantability, fitness for a particular purpose, or any other nature.

IMPORTANT NOTICE
The information contained in this Material Safety Data Sheet is based upon technical information Voltaix, Inc. believes to be reliable as of the date indicated at the top of this document. It is subject to revision as additional knowledge and experience are gained. These Data Sheets are provided for information purposes only. Users are cautioned not to rely on this Sheet as there may be additional important information contained in the Voltaix, Inc. current Material Safety Data Sheet which may be obtained from the Company upon request.